Microfluidic devices providing an accurate delivery of fluids at required rates are of considerable interest, especially for the biomedical field. The progress is limited by the lack of micropumps, which are compact, have high performance, and are compatible with standard microfabrication. This paper describes a micropump based on a new driving principle. The pump contains three membrane actuators operating peristaltically. The actuators are driven by nanobubbles of hydrogen and oxygen, which are generated in the chamber by a series of short voltage pulses of alternating polarity applied to the electrodes........
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